The system is equipped with multiple UHV chambers: evaporation chamber, sputtering chamber, processing chamber, load lock, electron beam evaporation source. The whole system is fully automatic control, which supports semi-automatic mode, manual mode, and remote maintenance. The UHV Sputter System has neat and intuitive modelling, elaborate surface treatment, smooth and brightening texture, which gives the person a feeling of soft, simple, modern and beautiful. Ergonomic design pursues the details.
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